Chungsik Yoon
Seoul National University, South Korea
Title: Characteristics of Chemicals and Trade Secrets Used in the Semiconductor Manufacturing Industry
Biography
Biography: Chungsik Yoon
Abstract
The semiconductor industry is considered the most high technology based industry and is characterized by complicated processes as well as massive chemical use. This study aimed to know the overall status of the chemical use, trade secrects and to evaluate the high risk CMR(carcinogens, mutagens and reproductive toxic) chemicals used in semiconductor manufacturing industries. On behalf of OSHRI (Occupational Safety and Health Research Institute) Project in Korea, we collected data about Serial no. chemical product name, chemical constituents (chemical name, CAS No.) and trade secrets, contents of each product, the physical status of chemical, amount of annual use, manufacturer and vendor of the chemical products, chemical use process from twelve workplaces. On average, 210±124 chemical products were used in semiconductor industry and 33±16% of proucts contained at least one trade sectrets. Numerous CMR substances were found including sulfuric acid, chromic acid, Ethylene oxide, hydroquinone and 2-Ethoxyethanol. More than 60% of chemical substane used in semiconductor industy has no NEFA index on health, safety and reactivity. Chemical product supplier was diverse. Average number of chemical product manufacturer was 62±21 per semiconductor plant and the number of chemical products supplied by each manufacturer was from 1 to 41 product.
High propotion of trade secrets, numerous numbers of CMR, high percentage of no health and safety information on the chemical proucts waits on proactive challenge and study for green chemistry and sustainabilty in semiconductor industry.